[ Article ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 27, No. 3, pp.182-187

ISSN: 2508-5107 (Online)

Print publication date 15 Jun 2018

Received 16 Apr 2018 Accepted 14 May 2018

DOI: https://doi.org/10.7735/ksmte.2018.27.3.182

단순직선 모서리형 툴의 수평 이송 기판 상 고주기 진동압입 기반 연속적 나노패턴 생산 시스템 개발

김지엽^a ; 이윤규^a ; 지강민^a ; 이승조^a ; 문승규^a ; 옥종걸^a^{, *}

Development of Continuous Nanopattern Manufacturing System Based on High-frequency Vibrational Indentation of Flat-edge Tool on a Horizontal-feeding Polymer Substrate

Jiyeop Kim^a ; Youn Kyu Lee^a ; Kang Min Jee^a ; Seungjo Lee^a ; Seung Kyu Moon^a ; Jong G. Ok^a^{, *}

aDepartment of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, 232, Gongneung-ro, Nowon-gu, Seoul 01811, Korea

Correspondence to: ^*Tel.: +82-2-970-9012, Fax: +82-2-979-7032, E-mail address: jgok@seoultech.ac.kr (Jong G. Ok).

Abstract

We developed a continuous nanopattern manufacturing system that realizes a high-frequency vibrational indentation of a simple flat-edge rigid tool onto a horizontal-feeding polymer substrate with computer-based control. We first designed a process principle and its implementation modules, and subsequently constructed a system prototype. By controlling the tool vibration frequency and indenting force as well as the substrate feeding speed and stroke direction, we can create diverse nanopatterns with various periods and shapes including period-tunable nanogratings and multidimensional nanostructures. Such manufactured nanopatterns may be utilized in many potential applications involving precision machinery components, displays and light sources, sensors and actuators, and flexible electronics and photonics, all of which require tunable periods and shapes.

Keywords:

Vibrational indentation, Nanopatterning, Continuous process, Precision process system

Acknowledgments

이 논문은 서울과학기술대학교 교내연구비 지원에 의하여 연구되었음.

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