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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 28, No. 5, pp.267-273

ISSN: 2508-5107 (Online)

Print publication date 15 Oct 2019

Received 18 Sep 2019 Revised 10 Oct 2019 Accepted 15 Oct 2019

DOI: https://doi.org/10.7735/ksmte.2019.28.5.267

투과형 전자현미경의 고니오미터형 시료 구동 스테이지의 설계

최기봉^a^{, *}

; 이상철^b

Design of a Goniometer-type Specimen Stage for Transmission Electron Microscopy

Kee-Bong Choi^a^{, *}

; Sang-Chul Lee^b

aDept. of Nano manufacturing Technology, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea
bElectron Microscopy Research Center, Korea Basic Science Institute, 169-148, Gwahak-ro, Yuseong-gu, Daejeon 34133, Korea

Correspondence to: ^*Tel.: +82-42-868-7132 Fax: +82-42-868-7721 E-mail address: kbchoi@kimm.re.kr (Kee-Bong Choi).

Abstract

In this study, a goniometer-type specimen stage for transmission electron microscopy is proposed. The specimen stage is mounted on the side of the vacuum chamber of a transmission electron microscope. A specimen is transported from the environment to the vacuum chamber via a holder, where positioning of the specimen is then conducted. The specimen stage comprises three translations and one rotational motion. As two translations are approximated linear motions, which are a part of the tilt motions, the term ‘goniometer’ is used. The actuation systems have been designed with consideration for the workspace and resolution. An air-locking device was also designed to separate the vacuum chamber from the atmosphere. Finally, the specimen stage was manufactured using aluminum and stainless steel to avoid the effect of a magnetic field. Experiments were then conducted to evaluate the performance of the proposed solution.

Keywords:

Transmission electron microscopy, Goniometer, Specimen stage, Holder, Air-lock mechanism

Acknowledgments

이 연구는 2019년 과학기술정보통신부의 재원으로 한국기초과학지원연구원 분석화학 연구장비개발 사업의 지원을 받아 수행되었습니다(주관연구사업코드 D35612).

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