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한국생산제조학회 학술지 영문 홈페이지
[ Papers ]
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 29, No. 2, pp.134-140
ISSN: 2508-5107 (Online)
Print publication date 15 Apr 2020
Received 14 Dec 2019 Revised 08 Mar 2020 Accepted 17 Mar 2020
DOI: https://doi.org/10.7735/ksmte.2020.29.2.134

재생타겟으로 제조된 ITO 박막의 표면 및 기계적 특성 연구

모영준a ; 이기성b ; 박태성c ; 박익근a ; 김용성b, *
Surface and Mechanical Properties of ITO Thin Films Deposited from a Recycled Target
Yeong-Jun Moa ; Ki-Seong Leeb ; Tae-Sung Parkc ; Ik-Keun Parka ; Young Sung Kimb, *
aMechanical and Automotive Engineering, Seoul National University of Science & Technology
bGraduate School of NID Fusing Technology, Seoul National University of Science & Technology
cNDT Research Center, Seoul National University of Science and Technology

Correspondence to: *Tel.: +82-2-970-6804 E-mail address: youngsk@seoultech.ac.kr (Young Sung Kim).

Abstract

We prepared ITO thin films using a recycled target with composition ratio of In2O3 : SnO3 (90 : 10 wt%). ITO thin films deposited on a glass plate at room temperature were examined for surfaces and micro structures at different heat-treatment temperatures. The mechanical properties of the transparent electrodes were also evaluated using an ultrasonic microscope and nanoindenter. When the annealing temperature was above 200℃, the ITO thin films showed stable transparent-electrode characteristics with resistivity of 1.55 × 10-4 Ωcm and high transmittance of > 85% at 550 nm through the processes of recovery and recrystallization. Results of nondestructive characterization using the ultrasonic microscope for the ITO thin-film surfaces and internal defects showed that the effects of changes to the internal defect density in the films were more dominant than those to the film surfaces. In addition, the film durability was evaluated by measuring the plasticity index using a nanoindenter.

Keywords:

Recycling target, ITO, Nanoindenter, Plasticity index, Ultrasonic microscope, Durability

Acknowledgments

이 논문은 2013년도 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업임(NRF-2013M2A2A9043274).

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