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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30, No. 1, pp.31-36

ISSN: 2508-5107 (Online)

Print publication date 15 Feb 2021

Received 27 Dec 2020 Revised 26 Jan 2021 Accepted 29 Jan 2021

DOI: https://doi.org/10.7735/ksmte.2021.30.1.31

열전소자를 이용한 반도체 검사용 자동 온도제어 모듈 개발

손덕수^a ; 동선희^a ; 이우영^a^{, *}

Development of Automatic Temperature Control Module for Semiconductor Test Process Using Thermoelectric Element

Deuk-soo Son^a ; Seon-Hee Dong^a ; Woo-Young Lee^a^{, *}

aSchool of Mechanical Engineering, Korea University of Technology and Education

Correspondence to: ^*Tel.: +82-41-560-1134 E-mail address: wylee@koreatech.ac.kr (Woo-Young Lee).

초록

In semiconductor manufacturing processes, the final inspection is a crucial last test stage for screening defective parts before delivery to customers. Since traditional convection-based temperature control has limitations and requires time for a solution, this study focuses on the development and verification of an automatic temperature control technology using conduction-based thermoelectric modules. From the performance tests, it is found that the module operates in the temperature range of –40℃ to 120℃, and all channels achieve temperature transitions at each step within 6 min. The temperature module shows accuracy variations of –0.8℃ to 1.9℃ over the entire stage, which fulfills the semiconductor industry requirement of within ±2℃ for inspection equipment.

Keywords:

Thermoelectric module (TEM), Semiconductor test equipment, Auto temperature control module, Temperature range, Temperature change time, Temperature precision

Acknowledgments

이 논문은 2019년도 한국기술교육대학교 교수 교육연구진흥과제 지원에 의하여 연구되었습니다.

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Deuk-soo Son

Ph.D. candidate in the School of Mechanical Engineering, Korea University of Technology and Education.His research interest is mechanical engineering.

E-mail: dsson@koreatech.ac.kr

Seon-Hee Dong

Ph.D. candidate in the School of Mechanical Engineering, Korea University of Technology and Education.Her research interest is mechanical engineering, injection molding and precision measurement.

E-mail: sunny61@koreatech.ac.kr

Woo-Young Lee

Professor in the School of Mechanical Engineering, Korea University of Technology and Education.His research interest is precision manufacturing process and product design.

E-mail: wylee@koreatech.ac.kr