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한국생산제조학회 학술지 영문 홈페이지
[ Papers ]
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 32, No. 1, pp.17-23
ISSN: 2508-5107 (Online)
Print publication date 15 Feb 2023
Received 15 Nov 2022 Revised 27 Dec 2022 Accepted 25 Jan 2023
DOI: https://doi.org/10.7735/ksmte.2023.32.1.17

부분충진 압축성형 방식에 의한 마이크로 렌즈 어레이 제작에 관한 연구

이남석a, *
Replication of Microlens Array via Partial-filling Compression Molding
NamSeok Leea, *
aDepartment of Smart Mechanical Engineering, Yonam Institute of Technology

Correspondence to: *Tel.: +82-55-751-2079 E-mail address: nslee@yc.ac.kr (NamSeok Lee).

Abstract

In this study, the fabrication method of a microlens array was investigated using the partial-filling compression molding process. During the full-filling molding process, the sticking that occurs during the release can deteriorate the surface quality of the molded microlens. Compared to full-filling molding, partial-filling compression molding exhibits easy release owing to the minimized contact area between the mold cavity and the molded part. The microlens array was fabricated using partial molding with Ni micromold via photolithography and Ni electroforming. Finally, the microlens array was replicated using the partial molding process, with a diameter and height of 50 and 8 μm, respectively.

Keywords:

Micro lens array, Electroforming, Master pattern, Micro mold, Compression molding, Partial filling

Acknowledgments

이 연구는 연암공과대학교 교비연구과제 지원으로 진행되었습니다.

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NamSeok Lee

Professor in the Department of Smart Mechanical Engineering, Yonam Institute of Technology. His research interest is Micro/ Nano Fabrication in the OLED and Semiconduct Process.

E-mail: nslee@yc.ac.kr