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한국생산제조학회 학술지 영문 홈페이지
[ Article ]
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 27, No. 2, pp.154-159
ISSN: 2508-5107 (Online)
Print publication date 15 Apr 2018
Received 03 Mar 2018 Accepted 09 Apr 2018
DOI: https://doi.org/10.7735/ksmte.2018.27.2.154

환경친화형 수계 박리액의 박리공정특성 및 청정성 평가 연구

이기성a ; 전진우b ; 손지영c ; 김준현b ; 주기태a ; 정병현d ; 이대원e ; 김용성a, *
Characteristics and Cleanliness of Strip Process of Environment-Friendly Aqueous Stripper
Ki-Seong Leea ; Jin Woo Jeonb ; Ji Young Sonc ; Joon Hyun Kimb ; Gi-Tae Jooa ; Byung Hyun Jeongd ; Dae Won Leee ; Young Sung Kima, *
aGraduate School of NID Fusing Technology, Seoul National University of Science & Technology 232, Gongneung-ro, Nowon-gu, Seoul 01811, Korea
bMechanical and Automotive Engineering, Seoul National University of Science & Technology 232, Gongneung-ro, Nowon-gu, Seoul 01811, Korea
cDepartment of Materials Science and Engineering, Seoul National University of Science & Technology 232, Gongneung-ro, Nowon-gu, Seoul 01811, Korea
dEotech, 311 GERI, 567, Bongsan-ri, Sandong-myeon, Gumi, Gyeongbuk-do, 39171, Korea
eDS Techopia, 39, Pungsesandan2-ro, Pungse-myeon, Cheonan, Chungnam-do, 31217, Korea

Correspondence to: *Tel.: +82-2-970-6804, Fax: +82-2-970-6011, E-mail address: youngsk@seoultech.ac.kr (Young Sung Kim).

Abstract

In this research, we studied the cleanliness of a developed aqueous stripper with optimized mixing ratio of the water and solute components. The stripping properties of an organic stripper were compared with those of the aqueous stripper, and the electrical and optical properties of the stripped specimen with a coated ITO film layer on glass were evaluated. From the result of the PR stripping process of the aqueous stripper with optimized water content and organic stripper, the aqueous stripper showed equal or better stripping capability than the organic stripper. In the case of the aqueous stripper, PR was floating in the stripper liquid through swelling and tearing, whereas the organic stripper showed dissolution of PR into the stripper liquid. Based on the difference in stripping mechanism between the organic and aqueous strippers, we estimated greenhouse gas (GHG) emissions and the amount of wastes in each stripper.

Keywords:

Aqueous stripper, ITO-Glass, Dipping, Photoresist, Stripping process, Swelling

Acknowledgments

이 연구는 2016년 청정생산기반전문기술개발사업 과제번호 10052250의 연구비지원으로 수행되었습니다.

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