[ Article ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 27, No. 4, pp.351-356

ISSN: 2508-5107 (Online)

Print publication date 15 Aug 2018

Received 20 Apr 2018 Revised 21 Jun 2018 Accepted 31 Jul 2018

DOI: https://doi.org/10.7735/ksmte.2018.27.4.351

반사 공압 기반 중공 노즐을 이용한 미세패턴 높이 측정

김형진^a ; 김병희^a^{, *} ; 서영호^a

Micropattern Height Measurement using Hollow Nozzle based on Reflected Pneumatic Pressure

Hyung Jin Kim^a ; Byeong Hee Kim^a^{, *} ; Young Ho Seo^a

aDepartment of Advanced Mechanical Engineering (Mechatronics Engineering), Kangwon National University, 1, Kangwondaehak-gil, Chuncheon, Gangwon-do, 24341, Korea

Correspondence to: ^*Tel.: +82-33-250-6374 Fax: +82-33-259-5551 E-mail address: kbh@kangwon.ac.kr (Byeong Hee Kim).

Abstract

This research proposed a new method to measure the height of micropattern by non-contact method using only pneumatic pressure. When a pneumatic constant pressure is through a hollow nozzle on a micropatterned object, the height of the micropattern can be measured using a pressure sensor located at the end of the nozzle. The measured pneumatic pressure depends on the height of the micropattern. Thus, the latter can be evaluated by converting pressure into distance. To verify the proposed method, the distance between the object and fabricated hollow nozzle was varied from 10 to 200 μm, and experiments were performed to investigate static responses. Furthermore, to confirm the dynamic response, experiments were performed to measure the reflected pneumatic pressure while moving the hollow nozzle over the micropattern. The static and dynamic state experiments, revealed an error of approximately 2% in the reflected pneumatic pressure.

Keywords:

Hollow nozzle, Reflected pneumatic pressure, Micropattern, CFD simulation, Height measurement

Acknowledgments

본 연구는 2017년도 강원대학교 대학회계 학술연구조성비(No.520170139)의 지원과 산업통상자원부와 한국산업기술진흥원이 지원하는 경제협력권산업 육성사업으로 수행된 연구결과입니다(P0001005).

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