[ Papers ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 29, No. 4, pp.305-309

ISSN: 2508-5107 (Online)

Print publication date 15 Aug 2020

Received 03 Jul 2020 Revised 11 Aug 2020 Accepted 12 Aug 2020

DOI: https://doi.org/10.7735/ksmte.2020.29.4.305

증착 후 전자-빔 조사 에너지에 따른 질화티타늄 박막의 특성

최수현^a ; 박윤제^a ; 김유성^b ; 이인식^b ; 김대욱^b ; 차병철^b ; 김대일^a^{, *}

Properties of TiN Films Fabricated through Post-deposition Electron Beam Irradiation

Su-Hyeon Choe^a ; Yun-Je Park^a ; Yu-Sung Kim^b ; In-Sik Lee^b ; Dea-Wook Kim^b ; Byung-Chul Cha^b ; Daeil Kim^a^{, *}

aSchool of Materials Science and Engineering, University of Ulsan
bAdvanced Forming Processes R&D Group, Korea Institute of Industrial Technology

Correspondence to: ^*Tel.: +82-52-712-8066 E-mail address: Dkim84@ulsan.ac.kr (Daeil Kim).

Abstract

In this study, the effect of electron beam irradiation on surface properties, such as hardness, adhesion, and surface roughness, of TiN films was investigated. The films were deposited on an SKD-61 substrate through cathodic arc ion plating. After deposition, the films were bombarded with an intense electron beam under incident energies of 500, 1000, and 1500 eV for 10 min. From the results, the surface hardness increased up to 3357 HV_IT at 1500 eV, and the critical load increased proportionally with irradiation energy from 15.8 to 23.4 N. In addition, the surface root-mean-square roughness of the films was significantly influenced by electron irradiation. Films subjected to electron irradiation at 1500 eV exhibited the lowest roughness of 397 nm.

Keywords:

TiN, Arc ion plating, Electron irradiation, Hardness, Adhesion

Acknowledgments

본 연구는 2020년도 커뮤니티비즈니스 활성화 사업 “생산기술융합을 통한 고부가가치 공예기술개발” 지원을 받아 수행된 연구임(P0008718).

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Su-Hyeon Choe

Graduate Student in the School of Materials science and Engineering, University of Ulsan.His research interest is electron beam irradiation and PVD.

E-mail: tngus2023@ulsan.ac.kr

Yun-Je Park

Graduate Student in the School of Materials science and Engineering, University of Ulsan.His research interest is flexible display and thin films process.

E-mail: q_s_p@naver.com

Yu-Sung Kim

Researcher in the Advanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology.His research interest is surface modification using ion beam process.

E-mail: yskim80@kitech.re.kr

In-Sik Lee

Researcher in the Advanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology.His research interest is surface modification.

E-mail: lis0506@kitech.re.kr

Dae-Wook Kim

Researcher in the Advanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology.His research interest is nano materials processing.

E-mail: dwkim@kitech.re.kr

Byung-Chul Cha

Senior Researcher in the Advanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology.His research interest is nano-micro technology.

E-mail: bccha76@kitech.re.kr

Daeil Kim

Professor in the School of Materials Science and Engineering, University of Ulsan.His research interest is PVD and TCO thin films.

E-mail: dkim84@ulsan.ac.kr