[ Technical Papers ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30, No. 4, pp.316-322

ISSN: 2508-5107 (Online)

Print publication date 15 Aug 2021

Received 19 Jul 2021 Revised 27 Jul 2021 Accepted 02 Aug 2021

DOI: https://doi.org/10.7735/ksmte.2021.30.4.316

롤투롤 나노 임프린트 시스템 균일 가압 모듈 개발

김가을^a^{, b} ; 김현태^a ; 이승현^a ; 강유성^b ; 전용호^b ; 이문구^b ; 권신^a^{, *}

Development of Roll-to-roll Nanoimprint System Uniform Pressing Module

Ga Eul Kim^a^{, b} ; Hyuntae Kim^a ; Seung-Hyun Lee^a ; Yousung Kang^b ; Yongho Jeon^b ; Moon Gu Lee^b ; Sin Kwon^a^{, *}

aDepartment of Printed Electronics, Nano-Convergence Manufacturing Systems Research Division, Korea Institute Machinery Materials (KIMM)
bDepartment of Mechanical Engineering, Ajou University

Correspondence to: ^*Tel.: +82-42-868-7219 E-mail address: skwon@kimm.re.kr (Sin Kwon).

Abstract

It is difficult to use roll-to-roll (R2R) substrate transfer and pressing process to secure the productivity of the nanoimprint lithography (NIL) process based on the contact pressing mechanism R2R NIL patterning with a precise level of uniform pressure in the imprinting area. In conventional pressing, the precision of the imprint process is limited by bending deformation of the pressing roller, processing errors of roundness and straightness, and roller alignment errors. Thus, a new type of force point adjustable pressing roller (FPAP) module to minimize bending deformation of the pressing roller and an air cushion pressing roller (ACP) module to improve unevenness caused by roller deformation, roller geometrical errors were developed. The performance of the new uniform pressing module was experimentally verified: pressure uniformity at the imprinting contact surface was ±30% for the conventional pressing module compared to ±7% for the FPAP module. The ACP module improved this value to ±3.5%.

Keywords:

Roll-to-roll, Nano-imprint, Roll pressing, Uniform pressing

Acknowledgments

본 연구는 산업통상자원부 및 한국산업기술평가관리원(KIET) 연구비 지원에 의한 연구입니다(No. 20000665).

References

Cho. Y. T., Jung. Y. G., 2013, A Study on the Expectation of Residual Layer Thickness in Roller Pressing Imprint Process, Journal of the Korean Society of Manufacturing Process Engineers, 12:1 104-109.
Austin, M. D., Ge, H., Wu, W., Li, M., Yu, Z., Wasserman, D., Lyon, S. A., Chou, S. Y., 2004, Fabrication of 5 nm Line Width and 14 nm Pitch Features by Nanoimprint Lithography, Appl. Phys. Lett., 84:26 5299. [https://doi.org/10.1063/1.1766071]
Wu, W., Tong, W. M., Bartman, J., Chen, Y., Walmsley, R., Yu, Z., Xia, Q., Park, I. K., Picciotto, C., Gao, J., Wang, S. Y., Morecroft, D., Yang, J., Berggren, K. K., Williams, R. S., 2008, Sub-10 nm Nanoimprint Lithography by Wafer Bowing, Nano Lett., 8:11 3865-3869. [https://doi.org/10.1021/nl802295n]
McMackin, I., Choi, J., Schumaker, P., Nguyen, V., Xu, F., Thompson, E., Babbs, D., Sreenivasan, S. V., Watts, M., Schumaker, N., 2004, Step and Repeat UV Nanoimprint Lithography Tools and Processes, Emerging Litho. Technol. VIII, 5374 222-231. [https://doi.org/10.1117/12.538733]
Ahn, S. H., Guo, L. J., 2009, Large-Area Roll-to-roll and Roll-to-plate Nanoimprint Lithography: A Step toward High-throughput Application of Continuous Nanoimprinting, ACS Nano, 3:8 2304-2310. [https://doi.org/10.1021/nn9003633]
Kooy, N., Mohamed, K., Pin, L. T., Guan, O. S., 2014, A Review of Roll-to-roll Nanoimprint Lithography, Nanoscale Res. Lett., 9:1 320. [https://doi.org/10.1186/1556-276X-9-320]
Ok, J. G., Youn, H. S., Kwak, M. K., Lee, K. T., Shin, Y. J., Guo, L. J., Greenwald, A., Liu, Y., 2012, Continuous and Scalable Fabrication of Flexible Metamaterial Films via Roll-to-roll Nanoimprint Process for Broadband Plasmonic Infrared Filters, Appl. Phys. Lett., 101:22 223102. [https://doi.org/10.1063/1.4767995]
Kang, M. G., Park, H. J., Ahn, S. H., Guo, L. J., 2010, Transparent Cu Nanowire Mesh Electrode on Flexible Substrates Fabricated by Transfer Printing and its Application in Organic Solar Cells, Sol. Energy Mater. Sol. Cells, 94:6 1179-1184. [https://doi.org/10.1016/j.solmat.2010.02.039]
Ahn, S. H., Kim, J. S., Guo, L. J., 2007, Bilayer Metal Wire-grid Polarizer Fabricated by Roll-to-roll Nanoimprint Lithography on Flexible Plastic Substrate, J. Vac. Sci. Technol. B, 25:6 2388-2391. [https://doi.org/10.1116/1.2798747]
Bae, S., Kim, H., Lee, Y., Xu, X., Park, J. S., Zheng, Y., Balakrishnan, J., Lei, T., Kim, H. R., Song, Y. I., Kim, Y. J., Kim, K. S., Ozyilmaz, B., Ahn, J. H., Hong, B. H., Iijima, S., 2010, Roll-to-roll Production of 30-inch Graphene Films for Transparent Electrodes, Nat. Nanotechnol., 5:8 574-578. [https://doi.org/10.1038/nnano.2010.132]
Ahn, S. H., Choi, M. S., Bae, H. D., Lim, J. S., Myung, H., Kim, H. M., Kang, S. I., 2007, Design and Fabrication of Micro Optical Film by Ultraviolet Roll Imprinting, Jpn. J. Appl. Phys., 46 5478. [https://doi.org/10.1143/JJAP.46.5478]
Uh, J. H., Lee, J. S., Kim, Y. H., Choi, J. T., Joo, M. G., Lim, C. S., 2002, Laser Engraving of Micro-patterns on Roll Surfaces, ISIJ Int., 42:11 1266-1272. [https://doi.org/10.2355/isijinternational.42.1266]
Hwang, E. S., Park, J. W., Kim, J. G., Cho, Y. T., Yeo, K. M., Seo, J. W., Kim, H., Lee, S. W., 2009, Micro Pattern Roll Mold for Large Area Display by Electroforming and Wrapping Method, Jpn. J. Appl. Phys., 48 050211. [https://doi.org/10.1143/JJAP.48.050211]
Ahn, S. H., Guo, L. J., 2008, High-speed Roll-to-roll Nanoimprint Lithography on Flexible Plastic Substrates, Adv. Mater., 20:11 2044-2049. [https://doi.org/10.1002/adma.200702650]
Chang, C. Y., Yang, S. Y., Sheh, J. L., 2006, A Roller Embossing Process for Rapid Fabrication of Microlens Arrays on Glass Substrates, Microsyst. Technol., 12:8 754-759. [https://doi.org/10.1007/s00542-006-0103-5]
Hwang, E. S., Kim, Y. J., 2003, Flexible Polysilicon Strain Gauge Array, Jpn. J. Appl. Phys., 42 L810. [https://doi.org/10.1143/JJAP.42.L810]
Lee, H., 2013, Effect of Imprinting Pressure on Residual Layer Thickness in Ultraviolet Nanoimprint Lithography, J. Vac. Sci. Technol. B, 23:3 1102-1106. [https://doi.org/10.1116/1.1900732]
Roisum, D. R., 1998, The Mechanics of Rollers, Tappi press, Atlanta, USA.
Gao, H., Tan, H., Zhang, W., Morton, K., Chou, S. Y., 2006, Air Cushion Press for Excellent Uniformity, High Yield, and Fast Nanoimprint across a 100 mm Field, Nano Lett., 6:11 2438-2441. [https://doi.org/10.1021/nl0615118]

Ga Eul Kim

Researcher in the Department of Printed Electronics, Korea Institute of Machinery & Materials.

His research interests include roll-to-roll processing system and pressure uniformity control for roll-to-roll system.

E-mail: autumn@kimm.re.kr

Hyuntae Kim

Researcher in the Department of Printed Electronics, Korea Institute of Machinery and Materials.

His research interests include printed electronics and roll-to-roll continuous manufacturing systems.

E-mail: kht1682@kimm.re.kr

Seung-Hyun Lee

Principal Researcher in the Department of Printed Electronics, Korea Institute of Machinery & Materials.

His research interest is Roll-to-roll coating, imprinting and printing system.

E-mail: shlee79@kimm.re.kr

Yousung Kang

Ph. D candidate in the Department of Mechanical Engineering, Ajou University.

His research interest is printable electronics.

E-mail: gidalim89@ajou.ac.kr

Yongho Jeon

Professor in the Department of Mechanical Engineering, Ajou University.

His research interest is Novel manufacturing processes.

E-mail: princaps@ajou.ac.kr

Moon Gu Lee

Professor in the Department of Mechanical Engineering, Ajou University.

His research interests include the analysis, design, and control of high-precision positioning systems and biomedical devices.

E-mail: moongulee@ajou.ac.kr

Sin Kwon

Principal Researcher in the Department of Printed Electronics, Korea Institute of Machinery & Materials.

His research interest is roll-to-roll processing/printing system for printed electronics

E-mail: skwon@kimm.re.kr