[ Best Paper of This Month ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30, No. 5, pp.339-344

ISSN: 2508-5107 (Online)

Print publication date 15 Oct 2021

Received 22 Jun 2021 Revised 03 Aug 2021 Accepted 10 Aug 2021

DOI: https://doi.org/10.7735/ksmte.2021.30.5.339

레이저 보조가공을 이용한 Si 광학부품의 초정밀 가공에 관한 연구

김대호^a ; 홍준희^b^{, *}

Study on Ultra-precision Machining of Si Optics Using Laser-assisted Machining

Dae Ho Kim^a ; Jun Hee Hong^b^{, *}

aGraduate School of Mechanical Engineering, Chungnam National University
bDepartment of Mechanical Engineering, Chungnam National University

Correspondence to: ^*Tel.: +82-42-821-5642 E-mail address: hongjh@cnu.ac.kr (Jun Hee Hong).

Abstract

The performance of optical components is sensitive to the surface roughness; hence, ultra-precision machining technique is significantly important. In this paper, ultra-precision machining and laser-assisted machining was performed; We evaluated them as methods for machining of silicon, an infrared optical component material. Machining brittle material by a diamond turning machine is challenging; laser-assisted machining resolves this issue. For instance, Si is an optical material with superior optical characteristics; however, Si usage is limited due to poor machinability. In contrast, Si can be machined with good surface roughness using laser-assisted machining. We obtained a surface roughness under Ra 10 nm, form accuracy under Pt 250 nm at the found optimal machining condition.

Keywords:

Ultra-precision machining, Laser-assisted machining, Surface roughness, Diamond turning, Infrared optics

References

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Dae Ho Kim

Ph.D. candidate in the Department of Mechanical Engineering, Chungnam National University. His research interest is PDM, CAD/CAM, and Injection Mold

E-Mail: scv3323@naver.com

Jun Hee Hong

Professor in the School of Mechanical Engineering, Chungnam National University. His research interest is Intelligent Measurement.

E-mail: hongjh@cnu.ac.kr