[ Papers ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30, No. 5, pp.410-414

ISSN: 2508-5107 (Online)

Print publication date 15 Oct 2021

Received 04 May 2021 Revised 22 Jul 2021 Accepted 04 Sep 2021

DOI: https://doi.org/10.7735/ksmte.2021.30.5.410

전자빔 조사 에너지에 따른 TIO/Ag/TIO 박막의 전기적, 광학적 특성 변화

최수현^a^{, ^†} ; 허성보^b^{, ^†} ; 장진규^a ; 김현진^a ; 최재욱^a ; 김유성^c ; 공영민^a ; 김대일^a^{, *}

Effect of Electron Irradiation on the Optical and Electrical Properties of TIO/Ag/TIO Films

Su-Hyeon Choe^a^{, ^†} ; Sung-bo Heo^b^{, ^†} ; Jin-Kyu Jang^a ; Hyun-Jin Kim^a ; Jae-Wook Choi^a ; Yu-Sung Kim^c ; Young-Min Kong^a ; Daeil Kim^a^{, *}

aSchool of Materials Science and Engineering, University of Ulsan
bDongnam Division, Korea Institute of Industrial Technology
cAdvanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology

Correspondence to: ^*Tel.: +82-52-712-8066 E-mail address: dkim84@ulsan.ac.kr (Daeil Kim). Contributed by footnote: ^† These authors equally contributed to this work.

Abstract

The influence of electron irradiation energy on the optical and electrical properties of TIO/Ag/TIO films has been investigated. These films prepared with RF and DC magnetron sputtering; they show the lowest resistivity of 4.71 × 10^-5 Ωcm. The visible transmittance also increased with the electron irradiation energy. The film irradiated at 700 eV shows 83.71% of visible transmittance. In addition, the electron irradiated films at 700 eV show a lower RMS roughness of 63.54 nm. Comparing the figure of merit, we conclude that the visible transmittance and electrical resistivity of the films are dependent on the electron irradiation energy; moreover, the opto-electrical performance of the film is enhanced by electron irradiation.

Keywords:

Ti doped indium oxide, Ag interlayer, Magnetron sputter, Electron irradiation

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Su-Hyeon Choe

Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is electron beam irradiation and PVD.

E-mail: tngus2023@ulsan.ac.kr

Sung-bo Heo

Researcher in the Dongnam Division, Korea Institute of Industrial Technology. His research interest is PVD and PACVD coatings.

E-mail: hsb85@kitech.re.kr

Jin-Kyu Jang

Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is surface modification and TCO thin films.

E-mail : asf724@ulsan.ac.kr

Hyun-Jin Kim

Graduate student in the school of Materials Science and Engineering, University of Ulsan.

His resarch interest is electron beam irradiation and flexible TCO thin films.

E-mail: jin0228@ulsan.ac.kr

Jea-Wook Choi

Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is electron beam irradiation and flexible TCO thin films.

E-mail: zndgn9@ulsan.ac.kr

Yu-Sung Kim

Researcher in the Advanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology. His research interest is surface modification using ion beam process.

E-mail : yskim80@kitech.re.kr

Young-Min Kong

Professor in the School of Materials Science and Engineering, University of Ulsan. His research interest is Bioceramics and Nanoscale composite.

E-mail: longmin2@ulsan.ac.kr

Daeil Kim

Professor in the School of Materials Science and Engineering, University of Ulsan. His research interest is PVD and TCO thin films.

E-mail: dkim84@ulsan.ac.kr