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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 31, No. 3, pp.147-153

ISSN: 2508-5107 (Online)

Print publication date 15 Jun 2022

Received 06 May 2022 Revised 31 May 2022 Accepted 02 Jun 2022

DOI: https://doi.org/10.7735/ksmte.2022.31.3.147

Finite Element Analysis and Fabrication of a 3 MHz Megasonic System for Semiconductor Cleaning

Hyunse Kim^a^{, b}^{, *} ; Euisu Lim^a ; Yanglae Lee^a

aInnovative Energy Machinery Research Division, Korea Institute of Machinery and Materials
bDepartment of Mechanical Engineering, University of Science & Technology

Correspondence to: ^*Tel.: +82-2-868-7967 E-mail address: hkim@kimm.re.kr (Hyunse Kim).

Abstract

Megasonic cleaning has been used to clean contaminants from wafer surfaces in semiconductor production. This research developed a 3 MHz megasonic waveguide for cleaning processes in semiconductor industries. Firstly, a 1 MHz type was fabricated in aluminum (Al) and quartz, consisting of a lead zirconate titanate (PZT) actuator and a waveguide. A 3 MHz quartz waveguide was also fabricated based on the fabricated results, and its performance was tested. In the design process, finite element analysis was performed. As a result, the predicted value was 2.997 MHz, which agreed with the measured value of 2.995 MHz with a 0.1% error. Lastly, a particle removal efficiency (PRE) test was performed, and the results showed that 93.1% PRE was achieved at 8W power. Considering the acoustic pressure and the cleaning test results, the 3 MHz megasonic may help the removal of contaminants from wafer surfaces effectively.

Keywords:

Megasonic, Cleaning, Finite element method(FEM), Waveguide, Piezoelectric actuator

Acknowledgments

This research was supported by the Korea Evaluation Institute of Industrial Technology (KEIT), under the Korea government Ministry of Knowledge Economy and by a research project (NK237C) of the Korea Institute of Machinery and Materials (KIMM).

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Hyunse Kim

Principal researcher in the Innovative Energy Machinery Research Division, Korea Institute of Machinery and Materials, and a Professor in University of Science & Technology. His research interest is ultrasonic cleaning, megasonic cleaning and ultrasonic machining.

E-mail: hkim@kimm.re.kr

Euisu Lim

Principal technician in the Innovative Energy Machinery Research Division, Korea Institute of Machinery and Materials. His research interest is ultrasonic and megasonic cleaning.

E-mail: eslim@kimm.re.kr

Yanglae Lee

Principal researcher in the Innovative Energy Machinery Research Division, Korea Institute of Machinery and Materials. His research interest is ultrasonic and megasonic cleaning.

E-mail: yllee@kimm.re.kr