[ Papers ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 32, No. 1, pp.37-41

ISSN: 2508-5107 (Online)

Print publication date 15 Feb 2023

Received 25 Nov 2022 Revised 20 Jan 2023 Accepted 27 Jan 2023

DOI: https://doi.org/10.7735/ksmte.2023.32.1.37

전자빔 표면조사에 따른 ZnO/Ag/ZnO 박막의 전기광학적 완성도 연구

김현진^a^{, b}^{, †} ; 이연학^b ; 장진규^b ; 최재욱^a^{, b} ; 최수현^a ; 허성보^a ; 김준호^a^{, †} ; 김대일^b^{, *}

Effects of Electron Irradiation on the Optoelectrical Performance of ZnO/Ag/ZnO Films

Hyun-Jin Kim^a^{, b}^{, †} ; Yeon-Hak Lee^b ; Jin-Kyu Jang^b ; Jae-Wook Choi^a^{, b} ; Su-Hyeon Choe^a ; Sung-Bo Heo^a ; Jun-Ho Kim^a^{, †} ; Daeil Kim^b^{, *}

aDongnam Division, Korea Institute of Industrial Technology
bSchool of Materials Science and Engineering, University of Ulsan

Correspondence to: ^*Tel.: +82-52-712-8066 E-mail address: dkim84@ulsan.ac.kr (Daeil Kim). ^† These authors equally contributed to this work

Abstract

Transparent ZnO/Ag/ZnO tri-layered films were deposited on a glass substrate using radio frequency and direct current magnetron sputtering. The thicknesses of the ZnO and Ag films were maintained at 30 and 10 nm, respectively, to consider the effects of electron irradiation on the optoelectrical properties of the films. XRD spectra revealed that post-deposition electron irradiated films exhibited characteristic peaks of ZnO (002) and Ag (111), respectively. The observed grain sizes of ZnO (002) and Ag (111) increased to 7.1 and 8.4 nm, respectively, under an irradiation condition of 900 eV, and the surface roughness of the electron irradiated films at 900 eV was reduced to 1.29 nm. The as-deposited films showed a figure of merit, indicating the optoelectrical performance of the films, of 4.1×10^-3 Ω^-1, whereas the films electron irradiated at 900 eV showed a higher figure of merit of 1.1×10^-2 Ω^-1.

Keywords:

ZnO, Ag, Grain size, Surface roughness

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Hyun-Jin Kim

Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His resarch interest is Electron Beam Irradiation and Flexible TCO Thin Films.

E-mail: khj96@kitech.re.kr

Yeon-Hak Lee

Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His resarch interest is Electron Beam Irradiation and Flexible TCO Thin Films.

E-mail: dusgkr11@ulsan.ac.kr

Jin-Kyu Jang

Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is Surface Modification and TCO Thin Films.

E-mail: asf724@ulsan.ac.kr

Jae-Wook Choi

Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is Electron Beam Irradiation and Flexible TCO Thin Films.

E-mail: zndgn8@kitech.re.kr

Su-Hyeon Choe

Researcher in the Dongnam Division, Korea Institute of Industrial Technology. His research interest is electron beam irradiation and PACVD coatings.

E-mail: shchoe2023@kitech.re.kr

Sung-Bo Heo

Researcher in the Dongnam Division, Korea Institute of Industrial Technology. His research interest is PVD and PACVD Coatings.

E-mail: hsb85@kitech.re.kr

Jun-Ho Kim

Researcher in the Dongnam Division, Korea Institute of Industrial Technology. His research interest is Low-temperature Carburizing and Nitriding.

E-mail: jhkim81@kitech.re.kr

Daeil Kim

Professor in the School of Materials Science and Engineering, University of Ulsan. His research interest is PVD and TCO Thin Films.

E-mail: dkim84@ulsan.ac.kr