한국생산제조학회 학술지 영문 홈페이지

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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30 , No. 5

[ Best Paper of This Month ]
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30, No. 5, pp.339-344
Abbreviation: J. Korean Soc. Manuf. Technol. Eng.
ISSN: 2508-5107 (Online)
Print publication date 15 Oct 2021
Received 22 Jun 2021 Revised 03 Aug 2021 Accepted 10 Aug 2021
DOI: https://doi.org/10.7735/ksmte.2021.30.5.339

레이저 보조가공을 이용한 Si 광학부품의 초정밀 가공에 관한 연구
김대호a ; 홍준희b, *

Study on Ultra-precision Machining of Si Optics Using Laser-assisted Machining
Dae Ho Kima ; Jun Hee Hongb, *
aGraduate School of Mechanical Engineering, Chungnam National University
bDepartment of Mechanical Engineering, Chungnam National University
Correspondence to : *Tel: +82-42-821-5642, Email: hongjh@cnu.ac.kr (Jun Hee Hong).


Abstract

The performance of optical components is sensitive to the surface roughness; hence, ultra-precision machining technique is significantly important. In this paper, ultra-precision machining and laser-assisted machining was performed; We evaluated them as methods for machining of silicon, an infrared optical component material. Machining brittle material by a diamond turning machine is challenging; laser-assisted machining resolves this issue. For instance, Si is an optical material with superior optical characteristics; however, Si usage is limited due to poor machinability. In contrast, Si can be machined with good surface roughness using laser-assisted machining. We obtained a surface roughness under Ra 10 nm, form accuracy under Pt 250 nm at the found optimal machining condition.


Keywords: Ultra-precision machining, Laser-assisted machining, Surface roughness, Diamond turning, Infrared optics

References
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Dae Ho Kim

Ph.D. candidate in the Department of Mechanical Engineering, Chungnam National University.

His research interest is PDM, CAD/CAM, and Injection Mold

E-mail: scv3323@naver.com

Jun Hee Hong

Professor in the School of Mechanical Engineering, Chungnam National University.

His research interest is Intelligent Measurement.

E-mail: hongjh@cnu.ac.kr