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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 33 , No. 1

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[ Best Paper of This Month ]
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30, No. 5, pp. 339-344
Abbreviation: J. Korean Soc. Manuf. Technol. Eng.
ISSN: 2508-5107 (Online)
Print publication date 15 Oct 2021
Received 22 Jun 2021 Revised 03 Aug 2021 Accepted 10 Aug 2021
DOI: https://doi.org/10.7735/ksmte.2021.30.5.339
레이저 보조가공을 이용한 Si 광학부품의 초정밀 가공에 관한 연구
김대호^a ; 홍준희^b^{, *}


Study on Ultra-precision Machining of Si Optics Using Laser-assisted Machining
Dae Ho Kim^a ; Jun Hee Hong^b^{, *}
aGraduate School of Mechanical Engineering, Chungnam National University
bDepartment of Mechanical Engineering, Chungnam National University
Correspondence to : ^*Tel.: +82-42-821-5642 E-mail address: hongjh@cnu.ac.kr (Jun Hee Hong).

Abstract

The performance of optical components is sensitive to the surface roughness; hence, ultra-precision machining technique is significantly important. In this paper, ultra-precision machining and laser-assisted machining was performed; We evaluated them as methods for machining of silicon, an infrared optical component material. Machining brittle material by a diamond turning machine is challenging; laser-assisted machining resolves this issue. For instance, Si is an optical material with superior optical characteristics; however, Si usage is limited due to poor machinability. In contrast, Si can be machined with good surface roughness using laser-assisted machining. We obtained a surface roughness under Ra 10 nm, form accuracy under Pt 250 nm at the found optimal machining condition.


Keywords: Ultra-precision machining, Laser-assisted machining, Surface roughness, Diamond turning, Infrared optics

References


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2.	Kim, G. H., Yang, S. C., Kim, H. S., Lee, I. J., Kook, M. H., Lee, D. H., 2007, Ultra Precision Machining Technology of Infrared Optical System for Astronomy and Space, J. Korean Soc. Precis. Eng., 24:2 25-32.
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7.	Kim, G. H., Jeon, M. W., Choi, H. J., Hyun, S. W., Oh, H. G., 2018, Ultra-precision Machining of Freeform Optical System using SPDTM and MRF, Proc. Korean Soc. Manuf. Technol. Eng. Spring Conf., 26.
8.	Kim, D. H., 2020, A Study on CaF2 Ultra-precision Cutting Characteristics using Laser Assisted Machining, Master Thesis, Hanbat Univ., Republic of Korea.
9.	Jeong, B. J., Kim, G. H., Myung, T. S., Chung, E. S., Choi, H. J., Yeo, I. J., Jeon, M. W., 2016, Micro-Crack Analysis from Ultra-Precision Diamond Turning of IR Optic Material, J. Korean Soc. Precis. Eng., 33:11 905-910.
*10.*	Lee, G. I., Kim, J. Y., 2018, A Study on Heat Generation and Machining Accuracy According to Material of Ultra-precision Machining, J. Korean Soc. Precis. Eng., 17:1 63-68.

Dae Ho Kim

Ph.D. candidate in the Department of Mechanical Engineering, Chungnam National University. His research interest is PDM, CAD/CAM, and Injection Mold

E-Mail: scv3323@naver.com

Jun Hee Hong

Professor in the School of Mechanical Engineering, Chungnam National University. His research interest is Intelligent Measurement.

E-mail: hongjh@cnu.ac.kr