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[ Papers ] | |
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 30, No. 5, pp. 410-414 | |
Abbreviation: J. Korean Soc. Manuf. Technol. Eng. | |
ISSN: 2508-5107 (Online) | |
Print publication date 15 Oct 2021 | |
Received 04 May 2021 Revised 22 Jul 2021 Accepted 04 Sep 2021 | |
DOI: https://doi.org/10.7735/ksmte.2021.30.5.410 | |
전자빔 조사 에너지에 따른 TIO/Ag/TIO 박막의 전기적, 광학적 특성 변화 | |
Effect of Electron Irradiation on the Optical and Electrical Properties of TIO/Ag/TIO Films | |
aSchool of Materials Science and Engineering, University of Ulsan | |
bDongnam Division, Korea Institute of Industrial Technology | |
cAdvanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology | |
Correspondence to : *Tel.: +82-52-712-8066 E-mail address: dkim84@ulsan.ac.kr (Daeil Kim). Contributed by footnote: † These authors equally contributed to this work. | |
The influence of electron irradiation energy on the optical and electrical properties of TIO/Ag/TIO films has been investigated. These films prepared with RF and DC magnetron sputtering; they show the lowest resistivity of 4.71 × 10-5 Ωcm. The visible transmittance also increased with the electron irradiation energy. The film irradiated at 700 eV shows 83.71% of visible transmittance. In addition, the electron irradiated films at 700 eV show a lower RMS roughness of 63.54 nm. Comparing the figure of merit, we conclude that the visible transmittance and electrical resistivity of the films are dependent on the electron irradiation energy; moreover, the opto-electrical performance of the film is enhanced by electron irradiation.
Keywords: Ti doped indium oxide, Ag interlayer, Magnetron sputter, Electron irradiation |
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Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is electron beam irradiation and PVD.
E-mail: tngus2023@ulsan.ac.kr
Researcher in the Dongnam Division, Korea Institute of Industrial Technology. His research interest is PVD and PACVD coatings.
E-mail: hsb85@kitech.re.kr
Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is surface modification and TCO thin films.
E-mail : asf724@ulsan.ac.kr
Graduate student in the school of Materials Science and Engineering, University of Ulsan.
His resarch interest is electron beam irradiation and flexible TCO thin films.
E-mail: jin0228@ulsan.ac.kr
Graduate Student in the School of Materials Science and Engineering, University of Ulsan. His research interest is electron beam irradiation and flexible TCO thin films.
E-mail: zndgn9@ulsan.ac.kr
Researcher in the Advanced Forming Process R&D Group of Ulsan Regional Division, Korea Institute of Industrial Technology. His research interest is surface modification using ion beam process.
E-mail : yskim80@kitech.re.kr
Professor in the School of Materials Science and Engineering, University of Ulsan. His research interest is Bioceramics and Nanoscale composite.
E-mail: longmin2@ulsan.ac.kr
Professor in the School of Materials Science and Engineering, University of Ulsan. His research interest is PVD and TCO thin films.
E-mail: dkim84@ulsan.ac.kr