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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 33 , No. 1

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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 31, No. 2, pp. 77-85
Abbreviation: J. Korean Soc. Manuf. Technol. Eng.
ISSN: 2508-5107 (Online)
Print publication date 15 Apr 2022
Received 24 Jan 2022 Revised 02 Mar 2022 Accepted 15 Mar 2022
DOI: https://doi.org/10.7735/ksmte.2022.31.2.77
보이스코일모터를 이용한 초정밀 자기부상 스테이지
이학준^a ; 안다훈^b^{, *}


Ultra-precision Magnetic Levitation Stage Utilizing Voice Coil Motors
Hak-Jun Lee^a ; Dahoon Ahn^b^{, *}
aSmart Manufacturing R&D Department, Korea Institute of Industrial Technology
bDepartment of Mechanical System Design Engineering, Seoul National University of Science and Technology
Correspondence to : ^*Tel.: +82-2-970-6532 E-mail address: dhahn@seoultech.ac.kr (Dahoon Ahn).



Funding Information ▼ Ministry of Science and ICT, South Korea National Research Foundation of Korea 2019R1G1A1099736 Ministry of Land, Infrastructure and Transport Korea Agency for Infrastructure Technology Advancement 20CTAP-C157468-02

Abstract

Voice coil motor is an actuator that employs a non-contact electromagnetic force between its coils and magnets, and is widely used in precision stages on account of its good linearity between current and force. Additionally, these advantages are beneficial for implementing the magnetic levitation mechanism. Unlike the case of general use of a voice coil motor where 1-DOF translational motion is applied, 6-DOF magnetic levitation causes variation in the relative position and orientation between the coil and the magnet. Accordingly, the force constant also changes. In this study, high-level precision positioning of 20 nm was realized through the design and control of a magnetic levitation stage using voice coil motors. In the process, the change in the force of the voice coil motor was found to be approximately 1% within the range of motion. Therefore, the proposed design was verified to be suitable for high-precision stages.


Keywords: Magnetic levitation (maglev), Voice coil motor (VCM), Force constant, High precision, Position control

Acknowledgments

이 성과는 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원 (No.2019R1G1A1099736) 및 국토교통부/국토교통과학기술진흥원의 지원 (과제번호 20CTAP-C157468-02) 으로 수행되었습니다.

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Hak-Jun Lee

Senior researcher in the Department of Smart Manufacturing R&D System, Korea Institute of Industrial Technology. His research interest is precision motion mechanism and semiconductor/display equipment.

E-mail: hak1414@kitech.re.kr

Dahoon Ahn

Professor in the Department of Mechanical System Design Engineering, Seoul National University of Science and Technology. His research interest is precision motion mechanism and energy harvesting.

E-mail: dhahn@seoultech.ac.kr