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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 28 , No. 1

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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 28, No. 1, pp. 17-22
Abbreviation: J. Korean Soc. Manuf. Technol. Eng.
ISSN: 2508-5107 (Online)
Print publication date 15 Feb 2019
Received 13 Dec 2018 Revised 12 Feb 2019 Accepted 13 Feb 2019
DOI: https://doi.org/10.7735/ksmte.2019.28.1.17
FIB-SEM 복합 구조물의 정적․동적 정밀도 해석에 관한 연구
이태홍^a ; 맹희영^b^{, *}


Static and Dynamic Accuracy Analysis of FIB-SEM Multifunctional Machine Structure
Tae Hong Lee^a ; Heeyoung Maeng^b^{, *}
aDepartment of Mechanical Engineering, Osan University 45, Cheonghak-ro, Osan, Gyeonggi-do, 18119, Korea
bDepartment of Mechanical System Design Engineering, Seoul National University of Science and Technology 232, Gongneung-ro, Nowon-gu, Seoul 01811, Korea
Correspondence to : ^*Tel.: +82-2-970-6363 Fax: +82-2-978-6878 E-mail address: maeng@seoultech.ac.kr (Heeyoung Maeng).



Funding Information ▼ Seoul National University of Science and Technology

Abstract

In order to realize nano processing technology using ion beam, it must be accumulated the design of nano-fabrication system, ion focusing mechanism, measurement technology, fabrication of nano-stage and nano tilting device, and processing technology, etc. In this study, three FIB, FE-SEM, and nano-stage components were stored to design the FIB and FE-SEM systems in an integrated structure with a balanced way. The test specimen adopts a design method for the structure that is connected through the tunnel between the chambers. In order to evaluate the influence of the center of gravity, static analysis, and modal analysis on the static and dynamic accuracy of the combined machine.


Keywords: Focused Ion Beam (FIB), Field Emission SEM (FE-SEM), Nano-stage and table, Static and dynamic analysis, Compound fabricated system

Acknowledgments

이 연구논문은 서울과학기술대학교 교내연구비의 지원으로 수행되었습니다(2019).

References


1.	Taniguchi, N., 1996, Nanotechnology - Integrated Processing Systems for Ultra-Precision and Ultra-fine Products, Oxford Univ. Press., London.
2.	Cleland, A. N., 2003, Foundations of Nanomechanics, Springer, London.
3.	Maeng, H. Y., Kim, S. G., 2005, Design and Modal Analysis of FIB-SEM Compound Machine Structure, Proceedings of KSMTE Spring conference, 14-19.
4.	Reyntjens, S. R., Puers, R., 2001, A review of focused ion beam application in microsystem technology, J. Micromechanics and Microengineering, 11 297-300.
5.	Chun, D. M., Kim, M. H., Lee, J. C., Ahn, S. H., 2008, A Nano Particle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions, International Journal of Precision Engineering and Manufacturing, 9:1 51-53.
6.	Tseng A. A., Chen K., Chen C. D., Ma K. J., 2003, Electron Beam Lithography in Nanoscale Fabrication: Recent Development, IEEE Transactions on Electronics Packaging Manufacturing, 26:2 141-149.
7.	Ahn, S. H., Chun, D. M., Kim, C. S., 2011, Nano-scale Hybrid Manufacturing Process by Nano Particle Deposition System (NPDS) and Focused Ion Beam (FIB), CIRP Annals-Manufacturing Technology, 60:1 583-586.
8.	Park, K. S., Kim, T. S., Lee, W. S., Joe, H. E., Min, B. K., Park, Y. P., Yang, H. S., Kang, S. M., Park, N. C., 2012, Application of solid immersion lens-based near-field recording technology to high-speed plasmonic nanolithography, Jpn. J. Appl. Phys., 51:8S2 08JF01.
9.	Kim, C. S., Jang, D. Y., Ahn, S. H., 2012, Developments in Micro/ Nanoscale Fabrication by Focused Ion Beams, Vacuum, 86:6 1014-1035.
*10.*	Fu, X. L., Li, P. G., Jin, A. Z., Chen, L. M., Yanga, H. F., Li, L. H., Tanga, W.H., Cuic, Z., 2005, Gas-assisted etching of niobium with focused ion beam, Microelectronic Engineering, 78:1 29-33.
*11.*	Kim, C. S., Ahn, S. H., Jang, D. Y., 2010, Nanoscale effects in carbon structures fabricated using focused ion beam-chemical vapor deposition. Thin Solid Films, 518:18 5177-5182.