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[ Papers ] | |
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 29, No. 2, pp. 134-140 | |
Abbreviation: J. Korean Soc. Manuf. Technol. Eng. | |
ISSN: 2508-5107 (Online) | |
Print publication date 15 Apr 2020 | |
Received 14 Dec 2019 Revised 08 Mar 2020 Accepted 17 Mar 2020 | |
DOI: https://doi.org/10.7735/ksmte.2020.29.2.134 | |
재생타겟으로 제조된 ITO 박막의 표면 및 기계적 특성 연구 | |
Surface and Mechanical Properties of ITO Thin Films Deposited from a Recycled Target | |
aMechanical and Automotive Engineering, Seoul National University of Science & Technology | |
bGraduate School of NID Fusing Technology, Seoul National University of Science & Technology | |
cNDT Research Center, Seoul National University of Science and Technology | |
Correspondence to : *Tel.: +82-2-970-6804 E-mail address: youngsk@seoultech.ac.kr (Young Sung Kim). | |
Funding Information ▼ |
We prepared ITO thin films using a recycled target with composition ratio of In2O3 : SnO3 (90 : 10 wt%). ITO thin films deposited on a glass plate at room temperature were examined for surfaces and micro structures at different heat-treatment temperatures. The mechanical properties of the transparent electrodes were also evaluated using an ultrasonic microscope and nanoindenter. When the annealing temperature was above 200℃, the ITO thin films showed stable transparent-electrode characteristics with resistivity of 1.55 × 10-4 Ωcm and high transmittance of > 85% at 550 nm through the processes of recovery and recrystallization. Results of nondestructive characterization using the ultrasonic microscope for the ITO thin-film surfaces and internal defects showed that the effects of changes to the internal defect density in the films were more dominant than those to the film surfaces. In addition, the film durability was evaluated by measuring the plasticity index using a nanoindenter.
Keywords: Recycling target, ITO, Nanoindenter, Plasticity index, Ultrasonic microscope, Durability |
이 논문은 2013년도 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업임(NRF-2013M2A2A9043274).
1. | Dang, M. T., Brunner, P. L. M., Wuest, J. D., 2014, A Green Approach to Organic Thin-film Electronic Devices: Recycling Electrodes Composed of Indium Tin Oxide (ITO), ACS Sustainable Chem. Eng., 2:12 2715-2721. |
2. | Hoshi, Y., Kato, H. O., Funatsu, K., 2003, Structure and Electrical Properties of ITO Thin Films Deposited at High Rate by Facing Target Sputtering, Thin Solid Films, 445:2 245-250. |
3. | Kurdesau, F., Khripunov, G., Da Cunha, A. F., Kaelin, M., Tiwari, A. N., 2006, Comparative Study of ITO Layers Deposited by DC and RF Magnetron Sputtering at Room Temperature, J. Non-Cryst. Solids, 352:9-20 1466-1470. |
4. | Dao, V. A., Choi, H., Heo, J., Park, H., Yoon, K., Lee, Y., Yi, J., 2010, rf-Magnetron Sputtered ITO Thin Films for Improved Heterojunction Solar Cell Applications, Curr. Appl. Phys., 10:3 S506-S509. |
5. | Yang, J., Retegan, T., Ekberg, C., 2013, Indium Recovery from Discarded LCD Panel Glass by Solvent Extraction, Hydrometallurgy, 137 68-77. |
6. | Shin, S. R., Lee, H. B., Jin, W. Y., Ko, K. J., Park, S., Yoo, S., Kang, J. W., 2018, Improving Light Extraction of Flexible OLEDs Using a Mechanically Robust Ag Mesh/ITO Composite Electrode and Microlens Array, J. Mater. Chem. C, 6:20 5444-5452. |
7. | Biswas, N., Ghosh, P., Sarkar, S., Moitra, D., Biswas, P. K., Jana, S., Mukhopadhyay, A. K., 2015, Nanomechanical Properties of Dip Coated Indium Tin Oxide Films on Glass, Thin Solid Films, 579 21-29. |
8. | Kim, B. S., Yun, J. D., Kim, J. K., 2003, Characterization of Thin Film Materials by Nanoindentation and Scanning Probe Microscopy, Korean J. Mater. Res., 13:9 606-612. |
9. | Heo, S. B., Kim, S. Y., Kim, S. H., Kim, S. K., Kim, Y. S., Kim, D., 2013, Effect of Vacuum Annealing on the Properties of ITO Thin Films, J. of the Korean Society for Heat Treatment, 26:2 55-58. |
10. | Ali, K., Khan, S. A., Jafri, M. Z. M., 2014, Structural and Optical Properties of ITO/TiO2 Anti-reflective Films for Solar Cell Applications, Nanoscale Res. Lett., 9:1 175. |
11. | Lii, D. F., Huang, J. L., Jen, I. J., Lin, S. S., Sajgalik, P., 2005, Effects of Annealing on the Properties of Indium-tin Oxide Films Prepared by Ion Beam Sputtering, Surf. Coat. Technol., 192:1 106-111. |
12. | Nam, E., Kang, Y. H., Son, D. J., Jung, D., Hong, S. J., Kim, Y. S., 2010, Electrical and Surface Properties of Indium Tin Oxide (ITO) Films by Pulsed DC Magnetron Sputtering for Organic Light Emitting Diode as Anode Material, Surf. Coat. Technol., 205 S129-S132. |
13. | Miyasaka, C., Park, I. K., Park, T. S., 2010, Nondestructive Evaluation of Nanostructured Thin Film System Using Scanning Acoustic Microscopy, J. Korean Soc. Nondestruc. Test., 30:5 437-443. |
14. | Park, T. S., Kwak, D. R., Park, I. K., Miyasaka, C., 2012, Evaluation of Adhesive Strength for Nano-structured Thin Film by Scanning Acoustic Microscope, J. Korean Soc. Nondestruc. Test., 32:4 393-400. |
15. | Keran, Z., Mihaljević, M., Runje, B., Markučič, D., 2017, Ultrasonic Testing of Grain Distortion Direction in Cold Formed Aluminium Profile, Arch. Civ. Mech. Eng., 17:2 375-381. |
16. | Zhang, S., 2010, Nanostructured Thin Films and Coatings: Mechanical Properties, CRC Press, New York. |
17. | Briscoe, B. J., Fiori, L., Pelillo, E., 1998, Nano-indentation of Polymeric Surfaces, J. Phys. D Appl. Phys., 31:19 2395. |
18. | Beake, B. D., Fox-Rabinovich, G. S., Veldhuis, S. C., Goodes, S. R., 2009, Coating Optimisation for High Speed Machining with Advanced Nanomechanical Test Methods, Surf. Coat. Technol., 203:13 1919-1925. |
19. | Ghassemali, E., Riestra, M., Bogdanoff, T., Kumar, B. S., Seifeddine, S., 2017, Hall-Petch Equation in a Hypoeutectic Al-Si Cast Alloy: Grain Size vs. Secondary Dendrite Arm Spacing, Procedia Engineering, 207 19-24. |
Master Candidate in the Department of Mechanical Engineering, Seoul National University of Science and Technology.His research interest is Nondestructive Evaluation and Nano-Micro Technology.
E-mail: yeongjunmo@gmail.com
Researcher in the Graduate School of NID Fusing Technology, Seoul National University of Science and Technology.His research interest is Material and Nano-Micro Technology.
E-mail: kiseonglee0@gmail.com
Research Professor in the NDT Research Center, Seoul National University of Science and Technology.His research interest is Nondestructive Evaluation.
E-mail: taesung78@seoultech.ac.kr
Professor in the Department of Mechanical & Automotive Engineering, Seoul National University of Science and Technology.His research interest is Nondestructive Evaluation.
E-mail: ikpark@seoultech.ac.kr.ac.kr
Professor in the Graduate School of NID Fusing Technology, Seoul National University of Science and Technology.His research interest is Material and Nano-Micro Technology.
E-mail: youngsk@seoultech.ac.kr