[ Papers ]

Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 32, No. 1, pp.29-36

ISSN: 2508-5107 (Online)

Print publication date 15 Feb 2023

Received 11 Nov 2022 Revised 10 Feb 2023 Accepted 10 Feb 2023

DOI: https://doi.org/10.7735/ksmte.2023.32.1.29

웨이퍼 핸들링을 위한 collet의 외관 비전 검사 장치 개발

고국원^a^{, *} ; 이지연^b

Development of a Visual Inspection System for Wafer Handling with Collets

Kuk Won Ko^a^{, *} ; Ji Yeon Lee^b

aDepartmet of Future Mobility Engineering, Halla University
bDepartment of AI Convergence Security, Halla University

Correspondence to: ^*Tel.: +82-33-760-1579 E-mail address: kukwon.ko@halla.ac.kr (kuk Won Ko).

Abstract

In semiconductor manufacturing, small and precise tools such as collets are used during the assembly process to control and improve product quality. Monitoring the quality of the collet, such as its shape, size, and hole, is crucial for ensuring high reliability when picking up a cut wafer during the semiconductor packaging process. In this study, we propose a defect detection algorithm using image processing techniques. The application was implemented in a visual C++ environment, which enables motion control, image acquisition control, and the execution of image processing algorithms. The test and analysis of the collet inspection system yielded a defect detection rate of 99.3%.

Keywords:

Collet, Visual inspection, Auto focus, Calibration, Image processing

Acknowledgments

이 연구는 한라대학교의 연구비 지원을 받아 이루어졌음에 감사드립니다.

References

Heo, G. H., Choo, M. K., Kim, W. H., Ko, K. W., 2014, Development of Collet Defect Detection Algorithm, 2014 Summer Annual Conference of IEIE, 1078-1079.
Han, C. H., Lee, S. J., Park, C. G., Lee, J. Y., Ryu, Y. K., Ko, K. W., 2016, 2D/3D Visual Optical Inspection System for Quad Chip, Journal of the Korea Academia-Industrial cooperation Society, 17:1 684-692. [https://doi.org/10.5762/KAIS.2016.17.1.684]
Kim, H. Y., Cho, J. S., 2019, Exterior Vision Inspection Method of Injection Molding Automotive Parts, J. Korea Inst. Inf. Commun. Eng., 23:2 127-132. [https://doi.org/10.6109/jkiice.2019.23.2.127]
Emilia, G. D'., Gasbarro, D. D., 2017, Review of Techniques for 2D Camera Calibration Suitable for Industrial Vision Systems, J. Phys.: Conf. Ser., 841 012030. [https://doi.org/10.1088/1742-6596/841/1/012030]
Xu, G., Zheng, A., Li, X., Su, J., 2016, A Method to Calibrate a Camera using Perpendicularity of 2D Lines in the Target Observations, Sci. Rep., 6 34951. [https://doi.org/10.1038/srep34951]
Huang, B., Zou, S., 2022, A New Camera Calibration Technique for Serious Distortion, Processes, 10:3 488. [https://doi.org/10.3390/pr10030488]
Nishimura, M., Nobuhara, S., Matsuyama, T., Shimizu, S., Fujii, K., 2015, A Linear Generalized Camera Calibration from Three Intersecting Reference Planes, 2015 IEEE International Conference on Computer Vision (ICCV), 2354-2362. [https://doi.org/10.1109/ICCV.2015.271]
Nijmeijer, A.G. J, Boer, M. A., Slump, C. H., Samsom, M. M., Bentum, M. J., Laanstra, G. J., Snijders, H., Smit, J., Herrmann, O. E., 1993, Correction of Lens-distortion for Real-time Image Processing System, Proceedings of IEEE Workshop on VLSI Signal Processing, 316-324. [https://doi.org/10.1109/VLSISP.1993.404474]
Bueno-Ibarra, M. A., Alvarez-Borrego, J., Acho, L., Chavez-Sanchez, M. C., 2005, Fast Autofocus Algorithm for Automated Microscopes, Opt. Eng., 44:6 063601. [https://doi.org/10.1117/1.1925119]
He, J., Zhou, R., Hong, Z.,2003, Modified Fast Climbing Search Auto-focus Algorithm with Adaptive Step Size Searching Technique for Digital Camera, IEEE Transactions on Consumer Electronics, 49:2 257-262. [https://doi.org/10.1109/TCE.2003.1209511]
Choi, K. J., Byun, H. R., Lee, I. B., 1999, Definition and Implementation of Image Enhancement Techniques for Efficient Binarization, Journal of KIISE:Software and Applications, 26:2 284-296.
Duda, R. O., Hart, P. E., 1972, Use of Hough Transformation to Detect Lines and Curves in Pictures, Commun. ACM., 15:1 11-15. [https://doi.org/10.1145/361237.361242]
Kim, S. H., Choi, H. I., 2008, Circular Shape Detection using Improved 2D Hough Transform, Proceedings of the Korean Information Science Society Conference, 35:2A 233-237.
Gonzalez, R. C., Woods, R. E., 2018, Digital Image Processing, Pearson Press, London.
Dougherty, E. R., Lotufo, R. A., 2003, Hands-on Morphological Image Processing, 45-60, SPIE Press, Bellingham, WA. [https://doi.org/10.1117/3.501104]

Kuk Won Ko

Professor in the Department of Future Mobility, Halla University. His research interest is Machine Vision.

E-mail: kukwon.ko@halla.ac.kr

Ji Yeon Lee

Professor in the Department of AI Convergence Security, Halla University. Her research interest is BigData Analysis.

E-mail: jiyoen.lee@halla.ac.kr