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Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 29, No. 4

6. p. 305 Properties of TiN Films Fabricated through Post-deposition Electron Beam Irradiation
Su-Hyeon Choe, Yun-Je Park, Yu-Sung Kim, In-Sik Lee, Dea-Wook Kim, Byung-Chul Cha, Daeil Kim
DOI: https://doi.org/10.7735/ksmte.2020.29.4.305

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Journal launch year : 1995
Frequency : 6 Issues per year
Online ISSN :2508-5107
DOI Prefix : 10.7735/ksmte
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