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[ Papers ] | |
Journal of the Korean Society of Manufacturing Technology Engineers - Vol. 32, No. 1, pp. 29-36 | |
Abbreviation: J. Korean Soc. Manuf. Technol. Eng. | |
ISSN: 2508-5107 (Online) | |
Print publication date 15 Feb 2023 | |
Received 11 Nov 2022 Revised 10 Feb 2023 Accepted 10 Feb 2023 | |
DOI: https://doi.org/10.7735/ksmte.2023.32.1.29 | |
웨이퍼 핸들링을 위한 collet의 외관 비전 검사 장치 개발 | |
고국원a, * ; 이지연b
| |
Development of a Visual Inspection System for Wafer Handling with Collets | |
Kuk Won Koa, * ; Ji Yeon Leeb
| |
aDepartmet of Future Mobility Engineering, Halla University | |
bDepartment of AI Convergence Security, Halla University | |
Correspondence to : *Tel.: +82-33-760-1579 E-mail address: kukwon.ko@halla.ac.kr (kuk Won Ko). | |
Funding Information ▼ |
In semiconductor manufacturing, small and precise tools such as collets are used during the assembly process to control and improve product quality. Monitoring the quality of the collet, such as its shape, size, and hole, is crucial for ensuring high reliability when picking up a cut wafer during the semiconductor packaging process. In this study, we propose a defect detection algorithm using image processing techniques. The application was implemented in a visual C++ environment, which enables motion control, image acquisition control, and the execution of image processing algorithms. The test and analysis of the collet inspection system yielded a defect detection rate of 99.3%.
Keywords: Collet, Visual inspection, Auto focus, Calibration, Image processing |
이 연구는 한라대학교의 연구비 지원을 받아 이루어졌음에 감사드립니다.
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Professor in the Department of Future Mobility, Halla University. His research interest is Machine Vision.
E-mail: kukwon.ko@halla.ac.kr
Professor in the Department of AI Convergence Security, Halla University. Her research interest is BigData Analysis.
E-mail: jiyoen.lee@halla.ac.kr